Enhanced mass sensing using subspace identification
in microcantilevers
Laurent Mevel, Albert Benveniste, Simon Berger, Mark
Spletzer, Arvind Raman
An interesting application of Micro-Electro-Mechanical Systems (MEMS)
is to detect a target mass particle attached eccentrically to a
microcantilever by measuring three dimensional modes in the
microcantilever vibration spectrum. The mass sensitivities of torsional
and lateral modes are of one magnitude order greater than that of
fundamental bending mode. In this paper we use subspace change
detection methods to detect corresponding changes in vibrations
behavior of the microcantilever.